A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)
| Author | : | |
| Rating | : | 4.46 (938 Votes) |
| Asin | : | 0486450287 |
| Format Type | : | paperback |
| Number of Pages | : | 288 Pages |
| Publish Date | : | 2016-02-26 |
| Language | : | English |
DESCRIPTION:
Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. Three appendices provide helpful references.. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness
Five Stars Leroy E. Frahm Great Price and fast delivery. Zoltan Ring said Ellipsometry. If you are a novice in using ellipsometry you could not pick a better book. If you noticed that certain films, thicknesses or substrates give you problem in measurements with your single wavelength ellipsometer - you will find out why and how to come around them.The book is devided into two sections. The first section explains how ellipsometry works, treats you to its basic equations, and explains psi-del trajectories for singele and multiple dielectric and absorbing films. It also shows you the ellipsometer's limitations, null points.The second part consits of case studies. It shows you. "Good Ellipsometer Intro Guide" according to John Podlesny. This is a good book for starters. It provides a good introduction for what ellipsometry is and what information it provides, equations to understand how the this information, a breakdown of the equipment, and several case studies to understand how this can be used for more intricate samples. The only limit is that it is for a one wavelength, one angle instrument.